Вакуумное тепловое покрытие с четырьмя источниками нагрева, оптическое поликристаллическое тонкое пленочное покрытие

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Характеристики


Ultra-High Vacuum Thermal Evaporation Coater With Four Heating Sources(10-6 torr)


optical thin film coating machine


Introduction of optical thin film coating machine


CY-1800X-ZF4 is a ultra-vacuum evaporation coater designed for coating oxygen sensitive


metallic materials, such as Ti, Al and Ir etc. It also can be used for coating all kinds of materials.  


It has four evaporation heater sources and coat two type of materials at the same time at high vacuum


up to 10-6 torr.  It is an excellent and cost-effective coating machine for research labs.


optical thin film coating machine


Technical parameters of optical thin film coating machine


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Input & Output Power



Input: 208 - 240VAC, 20 A, 50/60 Hz, single phase  


Total Power required:  8KW ( including pump)


other 3 phase voltage is available upon request


Output:  5VAC max.  and 300A Max.



Vacuum Chamber


 



Stainless steel chamber:  280mm ID. x 375 mm Height, ( ~23 Liter) Sand-blasting electrolytic polishing surface  


100 mm observation window  in front of chamber


Hinged type door for easy sample loading


Manually operated shutters are on top of each evaporation W boat, which allow evaporating 4 kinds of material one by one


4 KF40 ports built in chamber for connecting to necessary device



Vacuum Pump 


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High-speed turbo vacuum pump is included and connected to the vacuum chamber.


Vacuum speed:600L/S


Vacuum level:5.0x10-6  Torr


Limit vacuum: 5.0x10-7  Torr


Leaking rate: 5.0x10-7 Pa.


Vacuum port:150 mm diameter




Evaporation Source
&
Sample Holder


 



Four tungsten heating boats are included  supported by water cold electrodes


Tungsten heating boat has dimension 70mm L x 12 mm W x 3 mm H. Spare W boat is available at extra cost.


Each top of boat has a manual operation shutter 


Built in manual shutter allows evaporation source can be used without contamination


100 mm diameter rotating sample holder is on top of the chamber with diameter 260mm, which can be heated up to 600°C max. via digital temperature controller with +/1 °C accuracy


The distance between evaporation source and sample holder is 150-300 mm adjustable


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Thickness control


(optional)



One High-Resolution Film Thickness Monitor and Controller is optional


The accuracy of thickness control is 1.0A



Control Unit



Vacuum, thickness and power control are integrated into one control box


Control Unit is separated from vacuum chamber for easy moving


You may place the control unit on the top of vacuum station 



Overall Dimensions



L600mm× W860mm× H1500mm



Facility Requirement  


for Installation



Space:250 SF with height > 6 feet


Power:208 - 240V AC, single phase with Max 10KW ( 50A breaker)


Water: > 15L/minute flowing water required for electrode cooling.  You may order recirculating water chiller to save at extra cost.



 More photos of optical thin film coating machine


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Packaging & Shipping


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Our Services


 


1.We are a manufacturer so that we have the punctual delivery time.


2.One sales representative serves you from inquiry to products shipped out.Communicate directly and conveniently.


3.Professional R&D team.


4.Strict QC.


5.Smooth shipping.


6.Rich experience. We do OEM services.Our customers are all over the world like USA, UK, Russia, Korea, Southeast Asia, etc. so that we are quite experienced.


7.Certificate: All our products are CE approval.


8.Fast reply: Our team will respond your requests within 8-working-hour


 





Company Information


 


Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, 


manufacturing and sales of equipment used in scientific researches. Independence and innovation is the 


company's tenet.Our main products include: tube furnace, muffle furnace, plasma cleaner, vacuum furnace, 


atmosphere furnace,CVD system and customized lab equipment.Welcome you come to visit us.



 





 


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